Methods of incorporating leaker-devices into capacitor configurations to reduce cell disturb, and capacitor configurations incorporating leaker-devices

ABSTRACT

Some embodiments include an integrated assembly having first electrodes with top surfaces, and with sidewall surfaces extending downwardly from the top surfaces. The first electrodes are solid pillars. Insulative material is along the sidewall surfaces of the first electrodes. Second electrodes extend along the sidewall surfaces of the first electrodes and are spaced from the sidewall surfaces by the insulative material. Conductive-plate-material extends across the first and second electrodes, and couples the second electrodes to one another. Leaker-devices electrically couple the first electrodes to the conductive-plate-material and are configured to discharge at least a portion of excess charge from the first electrodes to the conductive-plate-material. Some embodiments include methods of forming integrated assemblies.

RELATED PATENT DATA

This patent resulted from a divisional of U.S. patent application Ser.No. 16/255,569 filed Jan. 23, 2019, which is hereby incorporated byreference herein.

TECHNICAL FIELD

Methods of incorporating leaker-devices into capacitor configurations toreduce cell disturb, and capacitor configurations incorporatingleaker-devices.

BACKGROUND

Computers and other electronic systems (for example, digitaltelevisions, digital cameras, cellular phones, etc.), often have one ormore memory devices to store information. Increasingly, memory devicesare being reduced in size to achieve a higher density of storagecapacity. Even when increased density is achieved, consumers oftendemand that memory devices also use less power while maintaining highspeed access and reliability of data stored on the memory devices.

Charge buildup within memory cells can be problematic for at least thereasons that such may make it difficult to reliability store data.Charge buildup may be become increasingly difficult to control ascircuitry is scaled to increasingly smaller dimensions.

It would be desirable to develop architectures which alleviate, or evenprevent, undesired charge buildup; and to develop methods forfabricating such architectures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic top view of a region of an example assembly atan example process stage of an example method for forming an exampleintegrated structures.

FIG. 1A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 1. The view of FIG. 1A is along the line A-A of FIG. 1.

FIG. 2 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 1.

FIG. 2A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 2. The view of FIG. 2A is along the line A-A of FIG. 2.

FIG. 3 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 2.

FIG. 3A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 3. The view of FIG. 3A is along the line A-A of FIG. 3.

FIG. 4 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 3.

FIG. 4A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 4. The view of FIG. 4A is along the line A-A of FIG. 4.

FIG. 5 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 4.

FIG. 5A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 5. The view of FIG. 5A is along the line A-A of FIG. 5.

FIG. 6 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 5.

FIG. 6A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 6. The view of FIG. 6A is along the line A-A of FIG. 6.

FIG. 7 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 6.

FIG. 7A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 7. The view of FIG. 7A is along the line A-A of FIG. 7.

FIG. 8 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 7.

FIG. 8A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 8. The view of FIG. 8A is along the line A-A of FIG. 8.

FIG. 9 is a diagrammatic top view of a region of the example assembly ofFIG. 1 at an example process stage following that of FIG. 8.

FIG. 9A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 9. The view of FIG. 9A is along the line A-A of FIG. 9.

FIG. 10 is a diagrammatic top view of a region of the example assemblyof FIG. 1 at an example process stage following that of FIG. 9.

FIG. 10A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 10. The view of FIG. 10A is along the line A-A of FIG.10.

FIG. 11 is a diagrammatic top view of a region of the example assemblyof FIG. 1 at an example process stage following that of FIG. 10.

FIG. 11A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 11. The view of FIG. 11A is along the line A-A of FIG.11.

FIG. 12 is a diagrammatic top view of a region of the example assemblyof FIG. 1 at an example process stage following that of FIG. 11.

FIG. 12A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 12. The view of FIG. 12A is along the line A-A of FIG.12.

FIG. 13 is a diagrammatic top view of a region of an example assembly atan example process stage of an example method for forming an exampleintegrated structure. The process stage of FIG. 13 may follow that ofFIG. 4.

FIG. 13A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 13. The view of FIG. 13A is along the line A-A of FIG.13.

FIG. 14 is a diagrammatic top view of a region of the example assemblyof FIG. 13 at an example process stage following that of FIG. 13.

FIG. 14A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 14. The view of FIG. 14A is along the line A-A of FIG.14.

FIG. 15 is a diagrammatic top view of a region of the example assemblyof FIG. 13 at an example process stage following that of FIG. 14.

FIG. 15A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 15. The view of FIG. 15A is along the line A-A of FIG.15.

FIG. 16 is a diagrammatic top view of a region of the example assemblyof FIG. 13 at an example process stage following that of FIG. 15.

FIG. 16A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 16. The view of FIG. 16A is along the line A-A of FIG.16.

FIG. 17 is a diagrammatic top view of a region of the example assemblyof FIG. 13 at an example process stage following that of FIG. 16.

FIG. 17A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 17. The view of FIG. 17A is along the line A-A of FIG.17.

FIG. 18 is a diagrammatic top view of a region of the example assemblyof FIG. 13 at an example process stage following that of FIG. 17.

FIG. 18A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 18. The view of FIG. 18A is along the line A-A of FIG.18.

FIG. 19 is a diagrammatic top view of a region of the example assemblyof FIG. 13 at an example process stage following that of FIG. 18.

FIG. 19A is a diagrammatic cross-sectional side view of the exampleassembly of FIG. 19. The view of FIG. 19A is along the line A-A of FIG.19.

FIG. 20 is a schematic diagram of an example memory array comprisingferroelectric capacitors.

FIG. 21 is a schematic diagram of an example memory cell comprising aferroelectric capacitor.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Some embodiments include utilization of leaker-devices to reduce chargebuildup along bottom electrodes of capacitors. The leaker-devices maycouple the bottom electrodes to a conductive plate. The conductive platemay be along top electrodes of the capacitors, and may be utilized toelectrically couple the top electrodes to one another. Theleaker-devices may have conductivity (or alternatively, resistance)tailored to enable excess charge to drain from the bottom electrodes tothe conductive plate, while not enabling problematic shorting betweenthe bottom electrodes and the conductive plate.

Many, if not most, primary memory cell disturb mechanisms are due to abuildup of potential at cell bottom (CB) electrode nodes. As discussedin more detail below, this disturb mechanism is applicable forferroelectric RAM (FERAM). However, other types of electronic devicesmay benefit from the disclosed subject matter as well.

In an embodiment, each of the memory cells in a memory array can beprogrammed to one of two data states to represent a binary value of “0”or “1” in a single bit. Such a cell is sometimes called a single-levelcell (SLC). Various operations on these types of cells are independentlyknown in the semiconductor and related arts.

Regardless of the memory cell arrangement, the primary disturbmechanisms discussed above can arise due to different factors. Forexample, charge on the cell bottom-node can rise due to factors such asplate glitch, access transistor leakage, cell-to-cell interactions,and/or other factors. If a dielectric material in a memory cell leakssignificantly, the state of the cell may be adversely affected.

In various embodiments described herein, leaker-devices are introducedinto a memory array to prevent build-up of potential at bottom nodes ofcapacitors associated with individual memory cells. Example embodimentsare described with reference to FIGS. 1-21.

Referring to FIGS. 1 and 1A, an assembly (i.e. apparatus, construction,etc.) 10 comprises a structure 14 over a base 12.

The base 12 may comprise semiconductor material; and may, for example,comprise, consist essentially of, or consist of monocrystalline silicon.The base 12 may be referred to as a semiconductor substrate. The term“semiconductor substrate” means any construction comprisingsemiconductive material, including, but not limited to, bulksemiconductive materials such as a semiconductive wafer (either alone orin assemblies comprising other materials), and semiconductive materiallayers (either alone or in assemblies comprising other materials). Theterm “substrate” refers to any supporting structure, including, but notlimited to, the semiconductor substrates described above. In someapplications, the base 12 may correspond to a semiconductor substratecontaining one or more materials associated with integrated circuitfabrication. Such materials may include, for example, one or more ofrefractory metal materials, barrier materials, diffusion materials,insulator materials, etc.

A gap is shown between the base 12 and the structure 14 to indicate thatthere may be additional materials, components, etc., provided betweenthe base 12 and the structure 14.

The structure 14 is shown to comprise first and second materials 16 and18. The first material 16 may be a sacrificial material; and in someembodiments may comprise, consist essentially of, or consist of silicon(e.g., polycrystalline silicon or polysilicon).

The second material 18 may be considered to form an insulative lattice,and may be referred to as an insulative-lattice-material. In someembodiments, the second material 18 may comprise, consist essentiallyof, or consist of silicon nitride.

In the shown embodiment, the insulative-lattice-material 18 includes ahorizontal beam 20 over the sacrificial material 16. The horizontal beam20 has an upper surface (i.e., top surface) 21.

The horizontal beam 20 will provide support to conductive pillars(discussed below) which are formed through the structure 14. In someembodiments (not shown) additional beams of the lattice material 18 maypass through the sacrificial 16 to provide additional support to theconductive pillars. In some embodiments, the structure 14 may bereferred to as a supporting structure, in that such structure willprovide support to the conductive pillars formed therein.

In some embodiments, the first material 16 may be selectively etchablerelative to the second material 18. The term “selectively etchable”means that the first material may be removed faster than the secondmaterial with appropriate etching conditions; and may include, but isnot limited to, applications in which the conditions are 100% selectivefor removal of the first material relative to the second material.

Although the materials 16 and 18 are shown to be homogeneous in theillustrated embodiment, in other embodiments one or both of thematerials 16 and 18 may be a heterogeneous combination of two or morecompositions.

The material 18 is shown provided in segments under the sacrificialmaterial 16, as well as being in the beam 20 above the sacrificialmaterial 16. In other embodiments, an insulative material different fromthe material 18 may be provided below the sacrificial material 16 inplace of the illustrated segments of material 18.

Conductive structures (i.e., conductive contacts) 22 are shown within abottom region of the structure 14. Processing described herein formscapacitors (e.g., capacitors shown in FIG. 12), and the conductivestructures 22 may be utilized to couple electrodes of such capacitorswith additional circuitry (e.g., transistors).

The conductive structures 22 comprise conductive material 23. Suchconductive material may comprise any suitable composition or combinationof compositions; such as, for example, one or more of various metals(e.g., titanium, tungsten, cobalt, ruthenium, nickel, platinum, etc.),metal-containing compositions (e.g., metal silicide, metal nitride,metal carbide, etc.), and/or conductively-doped semiconductor materials(e.g., conductively-doped silicon, conductively-doped germanium, etc.).In some embodiments, the conductive material 23 may comprise tungsten.

Referring to FIGS. 2 and 2A, openings 24 are formed in the supportingstructure 14. The openings 24 extend through materials 16 and 18, andexpose upper surfaces of the conductive structures 22. The openings 24may be formed with any suitable processing. For instance, a patternedmask (not shown) may be provided over supporting structure 14 andutilized to define locations of openings 24, and then the openings 24may be extended into the supporting structure 14 with one or moresuitable etches. Subsequently, the patterned mask may be removed toleave the assembly of FIGS. 2 and 2A.

It is noted that the base 12 (FIG. 1A) is not shown in FIG. 2A, or inany of the other figures which follow, in order to reduce the overallsizes of the drawings. It is to be understood, however, that the basewould be present at the process stages of such figures.

The openings 22 may have any suitable shape. FIG. 2 shows an exampleapplication in which the openings are circular-shaped when viewed fromabove. In other embodiments, the openings 22 may have other shapes,including, for example, elliptical shapes, polygonal shapes, etc.

Referring to FIGS. 3 and 3A, conductive material 25 is formed within theopenings 24. The conductive material 25 is ultimately utilized to formelectrodes of capacitors; and may be referred to as electrode materialor as first-electrode-material. The electrode material 25 may compriseany suitable composition or combination of combinations; such as, forexample, one or more of various metals (e.g., titanium, tungsten,cobalt, ruthenium, nickel, platinum, etc.), metal-containingcompositions (e.g., metal silicide, metal nitride, metal carbide, etc.),and/or conductively-doped semiconductor materials (e.g.,conductively-doped silicon, conductively-doped germanium, etc.). In someembodiments, the electrode material 25 may comprise, consist essentiallyof, or consist of titanium nitride.

The conductive material 25 is patterned into pillars 26 (which may bereferred to herein as conductive pillars, as vertically-extendingpillars, as first electrodes, as first-capacitor-electrodes, or asfirst-electrode-pillars). The conductive pillars 26 extend verticallythrough the supporting structure 14 to the conductive contacts 22. Eachof the pillars 26 comprises a top surface 31 and a bottom surface 33.Each of the pillars also comprises a sidewall surface 35 extending fromthe top surface 31 to the bottom surface 33. Each of the pillars 33comprises a pair of opposing sidewall surfaces 35 along thecross-section of FIG. 3A; but the top view of FIG. 3 shows that suchopposing sidewall surfaces actually merge into a single sidewall surfaceof each of the pillars. In the shown embodiment, the pillars 26 aresolid (specifically, are not hollow or container-shaped).

The bottom surfaces 33 of the pillars 26 are directly against theconductive material 23 of the contacts 22 in the shown embodiment.

The conductive material 25 may be formed within the opening 24 utilizingany suitable processing; including, for example, one or more of physicalvapor deposition (PVD), atomic layer deposition (ALD) and chemical vapordeposition (CVD). In some embodiments, the conductive material 25 may beformed to overfill the openings 24, and subsequently planarization(e.g., chemical-mechanical polishing (CMP)) may be utilized to removeexcess material 25 and to form the planarized upper surface 27 whichextends across the top surface 21 of the insulative-lattice-material 18,and across the top surfaces 31 of the pillars 26.

The vertically-extending pillars 26 of FIG. 3A are horizontally spacedfrom one another along the illustrated cross-section; and specificallyare spaced from one another by intervening spaces 28 (only one of whichis labeled in FIG. 3A). The vertically-extending pillars 26 of FIG. 3Amay be considered to be laterally supported by the horizontal beam 20 ofthe lattice structure comprising the lattice material 18. The horizontalbeam extends between the sidewall surfaces 35 of neighboring pillars.

Referring to FIGS. 4 and 4A, the top surfaces 31 of the conductivepillars 26 are recessed relative to the top surface 21 of theinsulative-lattice-material 18. Such forms recesses 30 over theconductive pillars 26. The top surfaces 31 are recessed to a depth Dsuch that the top surfaces are still along theinsulative-lattice-material 18 (i.e., the sacrificial material 16 is notexposed). In some embodiments, the depth D may be within a range of fromat least about 10% of the thickness of the insulative-lattice-material18 to at least about 90% of the thickness of theinsulative-lattice-material 18. In some embodiments, the depth D may beat least about 50 angstroms (Å). In some embodiments, the material 18may have a thickness within a range of from about 100 Å to about 500 Å,and the depth D may be within a range of from about 50 Å to about 490 Å.

The top surfaces 31 of the pillars 26 may be recessed with any suitableprocessing, including, for example, utilization of an etch selective forthe conductive material 25 relative to the insulative material 18. Theetch may be timed so that the recesses 30 are formed to the desireddepth.

Referring to FIGS. 5 and 5A, leaker-device-material 32 is formed withinthe recesses 30 and over the upper surface 21 of theinsulative-lattice-material 18. The leaker-device-material may compriseany suitable composition or combination of compositions. In someembodiments, the leaker-device-material 32 may comprise, consistessentially of, or consist of one or more of titanium, nickel andniobium in combination with one or more of germanium, silicon, oxygen,nitrogen and carbon. In some embodiments, the leaker-device-material maycomprise, consist essentially of, or consist of one or more of Si, Ge,SiN, TiSiN, TiO, TiN, NiO, NiON and TiON; where the chemical formulasindicate primary constituents rather than particular stoichiometries. Insome embodiments, the leaker device material may comprise, consistessentially of, or consist of titanium, oxygen and nitrogen. In someembodiments, the leaker-device-material may comprise amorphous silicon,niobium oxide, silicon-rich silicon nitride, etc.; either alone or inany suitable combination.

Referring to FIGS. 6 and 6A, the assembly 10 is subjected toplanarization (e.g., CMP) to form a planarized upper surface 39extending across the insulative-lattice-material 18 and theleaker-device-material 32.

Referring to FIGS. 7 and 7A, openings 34 are formed to extend throughmaterials 18, 32 and 25, and to thereby expose regions of thesacrificial material 16. The openings 34 may be formed with any suitablecombination of patterning and etches.

Referring to FIGS. 8 and 8A, the sacrificial material 16 (FIGS. 7 and7A) is removed to form voids 36 and expose the sidewall surfaces 35 ofthe conductive pillars 26. The voids 36 may be considered to be openingsbetween neighboring conductive pillars 26.

Referring to FIGS. 9 and 9A, the voids (openings) 36 are lined withinsulative material 38 to form the insulative material 38 along thesidewall surfaces 35 of the conductive pillars 26. The insulativematerial 38 may be referred to as insulative-capacitor-material, as itis ultimately utilized in a capacitor configuration. At least some ofthe insulative-capacitor-material 38 may comprise ferroelectricinsulative material, and in some embodiments an entirety of theinsulative-capacitor-material is ferroelectric insulative material.

The ferroelectric insulative material may comprise any suitablecomposition or combination of compositions; and in some exampleembodiments may include one or more of transition metal oxide,zirconium, zirconium oxide, niobium, niobium oxide, hafnium, hafniumoxide, lead zirconium titanate, and barium strontium titanate. Also, insome example embodiments the ferroelectric insulative material may havedopant therein which comprises one or more of silicon, aluminum,lanthanum, yttrium, erbium, calcium, magnesium, strontium, and arare-earth element.

The insulative-capacitor-material 38 may be formed to any suitablethickness; and in some embodiments may have a thickness within a rangeof from about 30 Å to about 250 Å.

Referring to FIGS. 10 and 10A, conductive material 40 is formed withinthe lined voids (openings) 36. The conductive material 40 is ultimatelyutilized to form electrodes of capacitors; and may be referred to aselectrode material, as capacitor-electrode-material, assecond-capacitor-electrode-material, or as second-electrode-material.The electrode material 40 may comprise any suitable composition orcombination of combinations; such as, for example, one or more ofvarious metals (e.g., titanium, tungsten, cobalt, ruthenium, nickel,platinum, etc.), metal-containing compositions (e.g., metal silicide,metal nitride, metal carbide, etc.), and/or conductively-dopedsemiconductor materials (e.g., conductively-doped silicon,conductively-doped germanium, etc.). In some embodiments, the electrodematerial 40 may comprise, consist essentially of, or consist of one ormore of molybdenum silicide, titanium nitride, titanium silicon nitride,ruthenium silicide, ruthenium, molybdenum, tantalum nitride, tantalumsilicon nitride and tungsten.

Referring to FIGS. 11 and 11A, the assembly 10 is subjected toplanarization (e.g., CMP) to form a planarized surface 41 extendingacross the materials 18, 32, 38 and 40. Such patterns the material 40into capacitor electrodes 42. In some embodiments, the pillars 26 may bereferred to as first-capacitor-electrodes (or as first electrodes), andthe electrodes 42 may be referred to as second-capacitor-electrodes (oras second electrodes). The second-capacitor-electrodes are laterallybetween the first-capacitor-electrodes (i.e., are laterally between thevertically-extending pillars 26), and are spaced from thefirst-capacitor-electrodes by the insulative material 38.

The first-capacitor-electrodes 26 and second-capacitor-electrodes 42,together with the insulative-capacitor-material 38, form a plurality ofcapacitors 44. Each capacitor has a single pillar 26, and shares asecond-capacitor-electrode 42 with other neighboring capacitors.

Referring to FIGS. 12 and 12A, conductive-plate-material 46 is formedacross the planarized upper surface 41. The conductive-plate-material 46is electrically coupled with the capacitor-electrode-material 40, andwith the leaker-device-material 32.

The conductive-plate-material 46 may comprise any suitable electricallyconductive materials, such as, for example, one or more of variousmetals (e.g., titanium, tungsten, cobalt, nickel, ruthenium, platinum,etc.), metal-containing compositions (e.g., metal silicide, metalnitride, metal carbide, etc.), and/or conductively-doped semiconductormaterials (e.g., conductively-doped silicon, conductively-dopedgermanium, etc.). The conductive-plate-material 46 may comprise adifferent composition than the electrodes 42. For instance, in someembodiments the electrodes 42 may comprise, consist essentially of, orconsist of TiSiN and/or TiN (where the chemical formulas list primarycompositions rather than specific stoichiometries), and theconductive-plate-material 46 may comprise, consist essentially of, orconsist of tungsten.

The leaker-device-material 32 is configured as leaker-devices 48 whichelectrically couple the first electrodes 26 of the capacitors 44 withthe conductive-plate-material 46 to enable discharge of at least aportion of any excess charge from the first electrodes 26 to theconductive-plate-material 46. In some embodiments, electrical resistanceof the leaker-devices 48 is tailored so that the leaker-devices 48 haveappropriate conductivity to remove excess charge from the firstelectrodes 26 while having low enough conductivity (e.g., high enoughresistance) so that the leaker-devices 48 do not undesirablyelectrically short the first electrodes 26 to theconductive-plate-material 46. In the embodiment of FIG. 12A, theleaker-devices 48 are horizontally elongated. For instance, the pillars26 may be considered to extend along (i.e., to be elongated along) avertical axis shown as an axis 5, and the leaker-devices 48 may beconsidered to be elongated along a horizontal axis shown as an axis 7.Each of the leaker-devices 48 has a bottom surface 43 directly againstthe conductive material 25 of a first electrode, and has an uppersurface 45 directly against the conductive-plate-material 46. In theshown embodiment, the upper surfaces 45 of the leaker-devices 48 aresubstantially coplanar with the upper surface 21 of thehorizontally-extending beam 20 of insulative-lattice-material 18; withthe term “substantially coplanar” meaning coplanar to within reasonabletolerances of fabrication and measurement.

In some embodiments, the capacitors 44 may be incorporated into memorycells 50 (such as, for example, ferroelectric memory cells) by couplingthe capacitors with appropriate circuit components. For instance, accesstransistors 49 are diagrammatically illustrated in FIG. 12A as beingcoupled to the first electrodes 26 through the conductive contacts(i.e., conductive interconnects) 22. The transistors 49, and/or othersuitable components, may be fabricated at any suitable process stage.For instance, in some embodiments the transistors 49 may be fabricatedat a process stage prior to the illustrated process stage of FIG. 1.

The memory cells 50 may be part of a memory array 52; such as, forexample, a FeRAM (Ferroelectric Random Access Memory) array.

In some embodiments, the leaker-devices 48 may be considered to beresistive interconnects coupling electrodes 26 within memory cells 50 tothe conductive-plate-material 46 (which may be referred to as a plateline or as a plate structure). If the leaker-devices are too leaky, thenone or more memory cells may experience cell-to-cell disturb. If theleaker-devices 48 are not leaky (conductive) enough, then excess chargefrom the electrodes 26 will not be drained. Persons of ordinary skill inthe art will recognize how to calculate the resistance needed for theleaker-devices 48 for a given memory array. In some embodiments, theleaker-devices 48 may have resistance within a range of from about 0.1megaohms to about 5 megaohms. Factors such as separation betweenadjacent memory cells, the insulative (dielectric) material used betweenthe memory cells, physical dimensions of the memory cells, the amount ofcharge placed in the memory cells, a size of the memory array, afrequency of operations conducted by the memory array, etc., may beconsidered when making a determination of the resistance appropriate forthe leaker-devices 48.

FIGS. 1-12 describe an example method for fabricating examplecapacitors. Another example method for fabricating example capacitors isdescribed with reference to FIGS. 13-19.

Referring to FIGS. 13 and 13A, the assembly 10 is shown at a processstage which may be follow that of FIGS. 4 and 4A. The upper surfaces 31of the conductive pillars 26 have then recessed relative to the uppersurface 21 of the insulative-lattice-material 18 to form the recesses30. An undulating topography extends into the recesses 30 and across thetop surface of the insulative-lattice-material 18. A material 60 isformed across the undulating topography. The material 60 may compriseleaker-device-material identical to the material 32 described above withreference to FIGS. 5 and 5A. Alternatively, the material 60 may comprisea precursor of the leaker-device-material; and in some embodiments maycomprise a material which will become leaker-device-material uponoxidation. For instance, the material 60 may be a precursor whichcomprises, consist essentially of, or consist of titanium and nitrogen(for instance, titanium nitride); and which upon oxidation becomes aleaker-device-material 32 comprising, consisting essentially of, orconsisting of titanium, nitrogen and oxygen. In the embodiment describedherein, the material 60 will be referred to as a precursor material.

The precursor material 60 may be formed to any suitable thickness. Insome embodiments, the precursor material 60 may be a continuous layerhaving a thickness within a range of from about 2 Å to about 20 Å. Theprecursor material 60 may be continuous (as shown), or may bediscontinuous.

Referring to FIGS. 14 and 14A, openings 34 a are formed to exposeregions of the sacrificial material 16. In some embodiments, theformation of the openings 34 a may be considered to comprise punchingthrough regions of the precursor material 16 and theinsulative-lattice-material 18. Segments of the precursor material 60remain over the pillars 26 after the formation of the openings 34 a.

In the shown embodiment of FIG. 14A, the conductive pillars 26 may beconsidered to be arranged in pairs; with two of the pillars beinglabeled as 26 a and 26 b, and being in a paired relationship with oneanother. The paired pillars 26 a and 26 b may be considered together toform a paired-neighboring-pillar-structure 62 a. Portions of otherpaired-neighboring-pillar-structures 62 b and 62 c are shown in FIG. 14Ato be proximate the structure 62 a, and to be spaced from the structure62 a by intervening gaps 64 a and 64 b. The processing stage of FIG. 14Ahas removed regions of the precursor material 60 and theinsulative-lattice-material 18 from the intervening gaps 34 a and 34 b,while leaving regions of the precursor material 60 and theinsulative-lattice-material 18 between the conductive pillars of thepaired-neighboring-pillar-structures (e.g., between the conductivepillars 26 a and 26 b). The remaining regions of the precursor material60 and the insulative-lattice-material 18 may be considered to be partof the paired-neighboring-pillar-structures. For instance, thepaired-neighboring-pillar-structure 62 a comprises a portion 66 whichincludes precursor material 60 and insulative-lattice-material 18.

Referring to FIGS. 15 and 15A, the sacrificial material 16 is removed toleave the voids (openings) 36.

Referring to FIGS. 16 and 16A, the insulative material 38 is formed toline the voids 36 with processing analogous that described above withreference to FIGS. 9 and 9A. The insulative material may be formedutilizing oxidizing conditions (e.g., utilizing one or more of O₂, O₃,H₂O₂, etc., with or without plasma) In the shown embodiment, theformation of the insulative material 38 oxidizes the precursor material60 (FIGS. 15 and 15A) to convert such material to theleaker-device-material 32. In some embodiments, the resultingleaker-device-material 32 may be a continuous layer having a thicknesswithin a range of from about 2 Å to about 20 Å. In some embodiments, theleaker-device-material 32 may be a continuous layer having a thicknesswithin a range of from about 6 Å to about 15 Å. In some embodiments, theleaker-device-material 32 of FIGS. 16 and 16A may be discontinuous.

Referring to FIGS. 17 and 17A, the electrode material 40 is formed tofill the lined voids 36 with processing analogous that described abovewith reference to FIGS. 10 and 10A.

Referring to FIGS. 18 and 18A, planarization is conducted to form theplanarized surface 41 with processing analogous that described abovewith reference to FIGS. 11 and 11A. Such forms capacitors 44 a analogousto the capacitors 44 described above with reference to FIGS. 11 and 11A.

Referring to FIGS. 19 and 19A, the conductive-plate-material 46 isformed across upper surfaces of the capacitors 44 a. The capacitors 44 aare incorporated into memory cells 50 a analogous to the memory cells 50described above with reference to FIGS. 12 and 12A; and such memorycells 50 a are incorporated into a memory array 52 a.

The leaker-device-material 32 of FIG. 19A is similar to that of FIG.12A, and forms leaker-devices 48 a which couple the electrodes 26 to theconductive-plate-material 46. The leaker-devices 48 a of FIG. 19A differfrom devices 48 of FIG. 12A in that the devices 48 a includevertically-elongated structures 64 which extend upwardly from the topsurfaces of the pillars 26.

The memory arrays described above (memory array 52 of FIG. 12 and memoryarray 52 a of FIG. 19) may be ferroelectric memory arrays, and may haveany suitable configuration. An example ferroelectric memory array isdescribed with reference to FIG. 20. The memory array of FIG. 20 isspecifically described as a memory array 52, but could alternatively bea memory array 52 a. The memory array of FIG. 20 includes a plurality ofsubstantially identical ferroelectric capacitors 44 (which would becapacitors 44 a if the memory array were the memory array 52 a).Wordlines 70 extend along rows of the memory array, and digit lines 72extend along columns of the memory array. Each of the capacitors 44 iswithin a memory cell 50 which is uniquely addressed utilizing acombination of a wordline and a digit line. The wordlines 70 extend todriver circuitry 76, and the digit lines 72 extend to detectingcircuitry 78. In some applications, the memory array 52 may beconfigured as ferroelectric random access memory (FeRAM).

The memory cells 50 may include the transistors 49 (described above withreference to FIG. 12) in combination with the ferroelectric capacitors.For instance, in some applications each of the memory cells 50 mayinclude one of the transistors 49 in combination with a ferroelectriccapacitor 44, as shown in FIG. 21. The memory cell 50 is shown coupledwith a wordline 70 and a digit line 72. Also, one of the electrodes ofthe capacitor 44 is shown coupled with a plate line comprising the platematerial 46. The plate line may be utilized in combination with thewordline 70 for controlling an operational state of the ferroelectriccapacitor 44.

The assemblies and structures discussed above may be utilized withinintegrated circuits (with the term “integrated circuit” meaning anelectronic circuit supported by a semiconductor substrate); and may beincorporated into electronic systems. Such electronic systems may beused in, for example, memory modules, device drivers, power modules,communication modems, processor modules, and application-specificmodules, and may include multilayer, multichip modules. The electronicsystems may be any of a broad range of systems, such as, for example,cameras, wireless devices, displays, chip sets, set top boxes, games,lighting, vehicles, clocks, televisions, cell phones, personalcomputers, automobiles, industrial control systems, aircraft, etc.

Unless specified otherwise, the various materials, substances,compositions, etc. described herein may be formed with any suitablemethodologies, either now known or yet to be developed, including, forexample, ALD, CVD, PVD, etc.

The terms “dielectric” and “insulative” may be utilized to describematerials having insulative electrical properties. The terms areconsidered synonymous in this disclosure. The utilization of the term“dielectric” in some instances, and the term “insulative” (or“electrically insulative”) in other instances, may be to providelanguage variation within this disclosure to simplify antecedent basiswithin the claims that follow, and is not utilized to indicate anysignificant chemical or electrical differences.

The particular orientation of the various embodiments in the drawings isfor illustrative purposes only, and the embodiments may be rotatedrelative to the shown orientations in some applications. Thedescriptions provided herein, and the claims that follow, pertain to anystructures that have the described relationships between variousfeatures, regardless of whether the structures are in the particularorientation of the drawings, or are rotated relative to suchorientation.

The cross-sectional views of the accompanying illustrations only showfeatures within the planes of the cross-sections, and do not showmaterials behind the planes of the cross-sections, unless indicatedotherwise, in order to simplify the drawings.

When a structure is referred to above as being “on”, “adjacent” or“against” another structure, it can be directly on the other structureor intervening structures may also be present. In contrast, when astructure is referred to as being “directly on”, “directly adjacent” or“directly against” another structure, there are no interveningstructures present. The terms “directly under”, “directly over”, etc.,do not indicate direct physical contact (unless expressly statedotherwise), but instead indicate upright alignment.

Structures (e.g., layers, materials, etc.) may be referred to as“extending vertically” to indicate that the structures generally extendupwardly from an underlying base (e.g., substrate). Thevertically-extending structures may extend substantially orthogonallyrelative to an upper surface of the base, or not.

Some embodiments include an integrated assembly having first electrodeswith top surfaces, and with sidewall surfaces extending downwardly fromthe top surfaces. The first electrodes are solid pillars. Insulativematerial is along the sidewall surfaces of the first electrodes. Secondelectrodes extend along the sidewall surfaces of the first electrodesand are spaced from the sidewall surfaces by the insulative material.Conductive-plate-material extends across the first and secondelectrodes, and couples the second electrodes to one another.Leaker-devices electrically couple the first electrodes to theconductive-plate-material and are configured to discharge at least aportion of excess charge from the first electrodes to theconductive-plate-material.

Some embodiments include an integrated assembly having first electrodeswhich are horizontally-spaced from one another, and which are configuredas vertically-extending pillars. Each of the vertically-extendingpillars has sidewall surfaces along a cross-section, has a bottomsurface, and has a top surface, with the sidewall surfaces extendingfrom the bottom surface to the top surface. Insulative material is alongthe sidewall surfaces of the vertically-extending pillars. Secondelectrodes are laterally between the vertically-extending pillars andare spaced from the sidewall surfaces by the insulative material.Conductive-plate-material extends across the first and secondelectrodes, and couples the second electrodes to one another.Leaker-devices extend from the top surfaces of the vertically-extendingpillars to the conductive-plate-material. The leaker-devices areconfigured to discharge at least a portion of excess charge from thefirst electrodes to the conductive-plate-material.

Some embodiments include a method of forming an apparatus. An assemblyis provided which includes conductive pillars extending verticallythrough a supporting structure to conductive contacts. The supportingstructure comprises an insulative-lattice-material over a sacrificialmaterial. A planarized upper surface of the assembly extends across topsurfaces of the conductive pillars and across a top surface of theinsulative-lattice-material. The top surfaces of the conductive pillarsare recessed relative to the top surface of theinsulative-lattice-material. Leaker-device-material is formed along therecessed top surfaces of the conductive pillars. The sacrificialmaterial is removed to expose sidewall surfaces of the conductivepillars and to leave openings between the conductive pillars. Theopenings are lined with insulative-capacitor-material to form theinsulative-capacitor-material along the sidewall surfaces of theconductive pillars. Capacitor-electrode-material is formed within thelined openings. The capacitor-electrode-material,insulative-capacitor-material and conductive pillars together form aplurality of capacitors. Conductive-plate-material is formed to extendacross the capacitor-electrode-material and the leaker-device-material.The conductive-plate-material is electrically coupled with thecapacitor-electrode-material and with the leaker-device-material. Theleaker-device-material electrically couples the conductive pillars tothe conductive-plate-material.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

We claim:
 1. A method of forming an apparatus, comprising: providing anassembly which includes conductive pillars which extend verticallythrough a supporting structure to conductive contacts; the supportingstructure comprising an insulative-lattice-material over a sacrificialmaterial; a planarized upper surface of the assembly extending acrosstop surfaces of the conductive pillars and across a top surface of theinsulative-lattice-material; recessing the top surfaces of theconductive pillars relative to the top surface of theinsulative-lattice-material; forming leaker-device-material along therecessed top surfaces of the conductive pillars; removing thesacrificial material to expose sidewall surfaces of the conductivepillars and to leave openings between the conductive pillars; lining theopenings with insulative-capacitor-material to form theinsulative-capacitor-material along the sidewall surfaces of theconductive pillars; forming capacitor-electrode-material within thelined openings; the capacitor-electrode-material,insulative-capacitor-material and conductive pillars together forming aplurality of capacitors; and forming conductive-plate-material extendingacross the capacitor-electrode-material and the leaker-device-material;the conductive-plate-material being electrically coupled with thecapacitor-electrode-material and with the leaker-device-material; theleaker-device-material electrically coupling the conductive pillars tothe conductive-plate-material.
 2. The method of claim 1 wherein thesacrificial material comprises polycrystalline silicon.
 3. The method ofclaim 2 wherein the insulative-lattice-material comprises siliconnitride.
 4. The method of claim 1 wherein theinsulative-capacitor-material is ferroelectric insulative material. 5.The method of claim 1 wherein the leaker-device-material comprises oneor more of Ti, Ni and Nb, in combination with one or more of Ge, Si, O,N and C.
 6. The method of claim 1 wherein the leaker-device-materialcomprises one or more of Si, Ge, SiN, TiSiN, TiO, TiN, NiO, NiON andTiON; where the chemical formulas indicate primary constituents ratherthan particular stoichiometries.
 7. The method of claim 1 wherein theleaker-device-material comprises titanium, oxygen and nitrogen.
 8. Themethod of claim 1 wherein the recessing of the top surfaces of theconductive pillars forms recesses over the conductive pillars; andcomprising: forming the leaker-device-material within the recesses andover the insulative-lattice-material; and removing theleaker-device-material from over the insulative-lattice-material with aplanarization process which forms a planarized surface extending acrossthe leaker-device-material and the insulative-lattice-material.
 9. Themethod of claim 1 wherein the recessing of the top surfaces of theconductive pillars forms recesses over the conductive pillars; whereinan undulating topography extends into the recesses and across the topsurface of the insulative-lattice-material; and comprising: forming aprecursor of the leaker-device-material along the undulating topographyto line the recesses and to extend along the top surface of theinsulative-lattice-material; punching through regions of the precursorand the insulative-lattice-material between the conductive pillars toexpose the sacrificial material, and then conducting the removing of thesacrificial material; the punching through said regions of the precursorremoving some of the precursor while leaving segments of the precursorremaining over the conductive pillars; and forming theinsulative-capacitor-material over the remaining segments of theprecursor while conducting the lining of the openings with theinsulative-capacitor-material; the forming of theinsulative-capacitor-material over the remaining segments of theprecursor oxidizing the remaining segments of the precursor to convertsaid remaining segments into the leaker-device-material.
 10. The methodof claim 9 wherein the precursor comprises titanium and nitrogen; andwherein the leaker-device-material comprises titanium, nitrogen andoxygen.
 11. The method of claim 9 wherein the conductive pillars, alonga cross-section, comprise paired-neighboring-pillar-structures andintervening gaps between the paired-neighboring-pillar-structures;wherein some of the regions of the precursor and theinsulative-lattice-material between the conductive pillars are over theintervening gaps, and some of the regions of the precursor and theinsulative-lattice-material between the conductive pillars are part ofthe paired-neighboring-pillar-structures; and wherein the punchingthrough the regions of the precursor and the insulative-lattice-materialcomprises punching through the regions of the precursor and theinsulative-lattice-material that are over the gaps, and not punchingthrough the regions of the precursor and the insulative-lattice-materialthat are part of the paired-neighboring-pillar-structures.
 12. A methodof forming an integrated assembly, comprising: forming first electrodeshaving top surfaces and sidewall surfaces extending downwardly from thetop surfaces; the first electrodes being solid pillars; forming aninsulative material along the sidewall surfaces of the first electrodes;forming second electrodes extending along the sidewall surfaces of thefirst electrodes and being spaced from the sidewall surfaces by theinsulative material; forming conductive-plate-material extending acrossthe first and second electrodes, and coupling the second electrodes toone another; and forming leaker-devices electrically coupling the firstelectrodes to the conductive-plate-material, the leaker-devices beingconfigured to discharge at least a portion of excess charge from thefirst electrodes to the conductive-plate-material.
 13. The method ofclaim 12 wherein the leaker-devices extend from the top surfaces of thefirst electrodes to the conductive-plate-material.
 14. The method ofclaim 13 wherein the leaker-devices are horizontally-elongatedstructures extending along the top surfaces of the first electrodes. 15.The method of claim 13 wherein the leaker-devices includevertically-elongated structures extending upwardly from the top surfacesof the first electrodes.
 16. The method of claim 12 wherein the firstelectrodes, insulative material, second electrodes, and leaker-devicestogether comprise capacitors; and wherein each of the capacitors iscomprised by a memory cell of a memory array.
 17. The method of claim 12wherein the insulative material is ferroelectric insulative material.18. A method of forming an integrated assembly, comprising: formingfirst electrodes horizontally-spaced from one another, and which areconfigured as vertically-extending pillars; each of thevertically-extending pillars having sidewall surfaces along across-section, having a bottom surface, and having a top surface, withthe sidewall surfaces extending from the bottom surface to the topsurface; forming an insulative material along the sidewall surfaces ofthe vertically-extending pillars; forming second electrodes laterallybetween the vertically-extending pillars and spaced from the sidewallsurfaces by the insulative material; forming conductive-plate-materialextending across the first and second electrodes, and coupling thesecond electrodes to one another; and forming leaker-devices extendingfrom the top surfaces of the vertically-extending pillars to theconductive-plate-material; the leaker-devices being configured todischarge at least a portion of excess charge from the first electrodesto the conductive-plate-material.
 19. The method of claim 18 wherein theleaker-devices are horizontally-elongated structures extending along thetop surfaces of the vertically-extending pillars.
 20. The method ofclaim 18 wherein the leaker-devices include vertically-elongatedstructures extending upwardly from the top surfaces of thevertically-extending pillars.
 21. The method of claim 18 wherein thevertically-extending pillars are laterally supported by horizontal beamsof a lattice-structure; and wherein said horizontal beams extend betweensidewall surfaces of neighboring vertically-extending pillars.
 22. Themethod of claim 21 wherein the horizontal beams have upper surfaces;wherein the leaker-devices have upper surfaces; and wherein the uppersurfaces of the horizontal beams are substantially coplanar with theupper surfaces of the leaker-devices.